JPH0225564U - - Google Patents
Info
- Publication number
- JPH0225564U JPH0225564U JP10394488U JP10394488U JPH0225564U JP H0225564 U JPH0225564 U JP H0225564U JP 10394488 U JP10394488 U JP 10394488U JP 10394488 U JP10394488 U JP 10394488U JP H0225564 U JPH0225564 U JP H0225564U
- Authority
- JP
- Japan
- Prior art keywords
- substrate holder
- chamber
- inlet chamber
- substrate
- cooling water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 239000000498 cooling water Substances 0.000 claims 3
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10394488U JPH0225564U (en]) | 1988-08-05 | 1988-08-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10394488U JPH0225564U (en]) | 1988-08-05 | 1988-08-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0225564U true JPH0225564U (en]) | 1990-02-20 |
Family
ID=31335225
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10394488U Pending JPH0225564U (en]) | 1988-08-05 | 1988-08-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0225564U (en]) |
-
1988
- 1988-08-05 JP JP10394488U patent/JPH0225564U/ja active Pending
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